Subjects : RF sputtering deposition
| Type | Year | Title | Cited | Download |
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| Journal | 2018 | Deposition Pressure Dependent Electric Properties of (Hf, Zr)O2 Thin Films Made by RF Sputtering Deposition Method Moon Seungeon Journal of the Korean Physical Society, v.73, no.11, pp.1712-1715 | 0 | 원문 |
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