Subjects : gap cavity
| Type | Year | Title | Cited | Download |
|---|---|---|---|---|
| Journal | 2006 | Micromachined Air-Gap Structure MEMS Acoustic Sensor using Reproducible High-Speed Lateral Etching and CMP Process Sang Choon Ko Journal of Micromechanics and Microengineering, v.16, no.10, pp.2071-2076 | 15 | 원문 |
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| Type | Year | Research Project | Primary Investigator | Download |
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