Subject

Subjects : Water pressure

  • Articles (1)
  • Patents (0)
  • R&D Reports (0)
논문 검색결과
Type Year Title Cited Download
Journal 2013 Micromachined stress-free TSV hole for AlGaN/GaN-on-Si (1 1 1) platform-based devices   Sang Choon Ko  Journal of Micromechanics and Microengineering, v.23, no.3, pp.1-7 3 원문
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연구보고서 검색결과
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