Subjects : Morphological defects
| Type | Year | Title | Cited | Download |
|---|---|---|---|---|
| Journal | 2009 | Fabrication of morphological defect-free vertical electrodes using a (1 1 0) silicon-on-patterned-insulator process for micromachined capacitive inclinometers 윤성식 Journal of Micromechanics and Microengineering, v.19, no.3, pp.1-7 | 21 | 원문 |
| Status | Year | Patent Name | Country | Family Pat. | KIPRIS |
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| Type | Year | Research Project | Primary Investigator | Download |
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