Subjects : isotropic silicon etching
| Type | Year | Title | Cited | Download |
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| Conference | 2008 | Fabrication and Characterization of Surface-Micromachined Compact Microheater for Gas Sensing Applications Jaewoo Lee Conference on Nanotechnology (IEEE-NANO) 2008, pp.476-479 | 1 | 원문 |
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| Type | Year | Research Project | Primary Investigator | Download |
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