Subjects : Film stress measurement
| Type | Year | Title | Cited | Download |
|---|---|---|---|---|
| Journal | 2007 | Stress Reduction of Ge2Sb2Te5 Crystallization by Capping Al2O3 Film Grown by PEALD Park Young Sam ECS Transactions, v.11, no.7, pp.245-248 | 2 | 원문 |
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| Type | Year | Research Project | Primary Investigator | Download |
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