Subjects : comb-drive actuator
| Type | Year | Title | Cited | Download |
|---|---|---|---|---|
| Conference | 2003 | A self-aligned vertical comb-drive actuator using surface micromachining for scanning micromirrors Dooyoung Hah IEEE LEOS International Conference on Optical MEMS 2003, pp.151-152 | 9 | 원문 |
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| Type | Year | Research Project | Primary Investigator | Download |
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