Subjects : Damascene process
| Type | Year | Title | Cited | Download |
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| Journal | 2008 | Polishing damages to electrical properties of BLT thin-film capacitors fabricated by damascene process 김남훈 Electronics Letters, v.44, no.24, pp.1-2 | 1 | 원문 |
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| Type | Year | Research Project | Primary Investigator | Download |
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