Subjects : Etching behavior
| Type | Year | Title | Cited | Download |
|---|---|---|---|---|
| Journal | 2007 | Fabrication of Oxide TFTs with Al2O3/ZnO Gate Stacks Patterned Using a Dry Etching Method Yoon Sung Min Electrochemical and Solid-State Letters, v.11, no.2, pp.J15-J18 | 9 | 원문 |
| Status | Year | Patent Name | Country | Family Pat. | KIPRIS |
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| Type | Year | Research Project | Primary Investigator | Download |
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