Subject

Subjects : Intermetal dielectric (IMD)

  • Articles (2)
  • Patents (0)
  • R&D Reports (0)
논문 검색결과
Type Year Title Cited Download
Journal 2008 Investigation of the Effect of Calcination Temperature on HMDS-treated Ordered Mesoporous Silica Film   하태정  Journal of Colloid and Interface Science, v.326, no.1, pp.186-190 14 원문
Journal 2008 HMDS Treatment of Ordered Mesoporous Silica Film for Low Dielectric Application   하태정  한국세라믹학회지, v.45, no.1, pp.48-53 1 원문
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