Subjects : Ion-surface interaction
| Type | Year | Title | Cited | Download |
|---|---|---|---|---|
| Journal | 2011 | Etching characteristics and mechanism of Ga-doped ZnO thin films in inductively-coupled HBr/X (X = Ar, He, N2, O2) plasmas 함용현 Vacuum, v.85, no.11, pp.1021-1025 | 9 | 원문 |
| Journal | 2010 | Etching Characteristics and Mechanism of ZnO and Ga-Doped ZnO Thin Films in Inductively Coupled HBr/Ar/CHF3 Plasma 함용현 Japanese Journal of Applied Physics, v.49, no.8 PART 2, pp.1-5 | 5 | 원문 |
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| Type | Year | Research Project | Primary Investigator | Download |
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