Subjects : N2 Purge
Type | Year | Title | Cited | Download |
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Journal | 2009 | Properties of Al₂O₃ Insulating Film Using the ALD Method for Nonvolatile Memory Application Soon-Won Jung 전기학회논문지, v.58, no.12, pp.2420-2424 |
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Type | Year | Research Project | Primary Investigator | Download |
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