Subject

Subjects : N2 Purge

  • Articles (1)
  • Patents (0)
  • R&D Reports (0)
논문 검색결과
Type Year Title Cited Download
Journal 2009 Properties of Al₂O₃ Insulating Film Using the ALD Method for Nonvolatile Memory Application   Soon-Won Jung  전기학회논문지, v.58, no.12, pp.2420-2424
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