Subjects : comb fingers
Type | Year | Title | Cited | Download |
---|---|---|---|---|
Conference | 2007 | Sensing gap reconfigurable capacitive type MEMS accelerometer Chang Han Je Device and Process Technologies for Microelectronics, MEMS, Photonics, and Nanotechnology IV (SPIE 6800), v.6800, pp.1-7 | 5 | 원문 |
Status | Year | Patent Name | Country | Family Pat. | KIPRIS |
---|---|---|---|---|---|
No search results. |
Type | Year | Research Project | Primary Investigator | Download |
---|---|---|---|---|
No search results. |