Subject

Subjects : Digital etch

  • Articles (1)
  • Patents (0)
  • R&D Reports (0)
논문 검색결과
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Journal 2018 DC and RF Characteristics of Enhancement-Mode Al2O3/AlGaN/GaN MIS-HEMTs Fabricated by Shallow Recess Combined with Fluorine-Treatment and Deep Recess   Jung Hyunwook  ECS Journal of Solid State Science and Technology, v.7, no.4, pp.197-200 2 원문
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