Subjects : Capture module
| Type | Year | Title | Cited | Download |
|---|---|---|---|---|
| Journal | 2015 | A Concave-Patterned TiN/PECVD-Si3N4 /TiN Diaphragm MEMS Acoustic Sensor Based on a Polyimide Sacrificial Layer Jaewoo Lee Journal of Micromechanics and Microengineering, v.25, no.12, pp.1-13 | 8 | 원문 |
| Status | Year | Patent Name | Country | Family Pat. | KIPRIS |
|---|---|---|---|---|---|
| No search results. | |||||
| Type | Year | Research Project | Primary Investigator | Download |
|---|---|---|---|---|
| No search results. | ||||