Subjects : ECR-CVD
| Type | Year | Title | Cited | Download |
|---|---|---|---|---|
| Conference | 2001 | Effects of O/sub 2//C/sub 2/F/sub 6/ plasma descum with RF cleaning on via formation in MCM-D substrate using photosensitive BCB Ju Chull Won Electronic Components and Technology Conference (ECTC) 2001, pp.1-3 | 원문 |
| Status | Year | Patent Name | Country | Family Pat. | KIPRIS |
|---|---|---|---|---|---|
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| Type | Year | Research Project | Primary Investigator | Download |
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