Subject

Subjects : Slope control

  • Articles (2)
  • Patents (0)
  • R&D Reports (0)
논문 검색결과
Type Year Title Cited Download
Journal 2011 Dual Etch Processes of Via and Metal Paste Filling for Through Silicon Via Process   함용현  Thin Solid Films, v.519, no.20, pp.6727-6731 26 원문
Journal 2011 Analysis of Etching Mechanism and Etched Slope Control of Silicon for Nanoimprinting Lithography   함용현  Journal of Nanoscience and Nanotechnology, v.11, no.7, pp.6523-6527 0 원문
특허 검색결과
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연구보고서 검색결과
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