Subject

Subjects : Silicon Membrane

  • Articles (3)
  • Patents (0)
  • R&D Reports (0)
논문 검색결과
Type Year Title Cited Download
Conference 2015 Thermoelectric Properties of Sputtered Silicon Membrane in Vertical Direction   Kim Junsoo  강유전체 연합 심포지엄 2015, pp.103-103
Journal 2006 Micromachined Air-Gap Structure MEMS Acoustic Sensor using Reproducible High-Speed Lateral Etching and CMP Process   Sang Choon Ko  Journal of Micromechanics and Microengineering, v.16, no.10, pp.2071-2076 15 원문
Journal 2005 Experimental Evaluation of Arrayed Microcolumns with Monolithic Structure   Jeong Jin Woo  Japanese Journal of Applied Physics, v.44, no.7B, pp.5565-5569 3 원문
특허 검색결과
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연구보고서 검색결과
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