Subjects : Silicon Membrane
| Type | Year | Title | Cited | Download |
|---|---|---|---|---|
| Conference | 2015 | Thermoelectric Properties of Sputtered Silicon Membrane in Vertical Direction Kim Junsoo 강유전체 연합 심포지엄 2015, pp.103-103 | ||
| Journal | 2006 | Micromachined Air-Gap Structure MEMS Acoustic Sensor using Reproducible High-Speed Lateral Etching and CMP Process Sang Choon Ko Journal of Micromechanics and Microengineering, v.16, no.10, pp.2071-2076 | 15 | 원문 |
| Journal | 2005 | Experimental Evaluation of Arrayed Microcolumns with Monolithic Structure Jeong Jin Woo Japanese Journal of Applied Physics, v.44, no.7B, pp.5565-5569 | 3 | 원문 |
| Status | Year | Patent Name | Country | Family Pat. | KIPRIS |
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| Type | Year | Research Project | Primary Investigator | Download |
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