Subjects : Vacuum Cavity
| Type | Year | Title | Cited | Download |
|---|---|---|---|---|
| Conference | 2016 | High Sensitivity Surface Micromachined Absolute Pressure Sensor Chang Han Je Eurosensors 2016, pp.1-4 | 18 | 원문 |
| Journal | 2016 | Surface Micromachined Pressure Sensor with Substrate Internal Vacuum Cavity Chang Han Je ETRI Journal, v.38, no.4, pp.685-694 | 2 | 원문 |
| Status | Year | Patent Name | Country | Family Pat. | KIPRIS |
|---|---|---|---|---|---|
| Registered | 2007 | MICRO GAS SENSOR AND METHOD FOR MANUFACTURING THE SAME | UNITED STATES |
| Type | Year | Research Project | Primary Investigator | Download |
|---|---|---|---|---|
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