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Detail
Registered MICRO GAS SENSOR AND METHOD FOR MANUFACTURING THE SAME
- Inventors
- Jun Chi Hoon, Sang Choon Ko, Park Seon Hee, Hyeon-Bong Pyo
- Application No.
- 11951986 (2007.12.06)
- Publication No.
- 20080134753 (2008.06.12)
- Registration No.
- 7963147 (2011.06.21)
- Country
- UNITED STATES
- Project Code
- 06MB3200, Ubiquitous Health Monitoring Module and System Development, Park Seon Hee
- Abstract
- Provided are a micro gas sensor for measuring a gas concentration configured to achieve a high heating and cooling rate of a gas sensitive layer, achieve temperature uniformity, and achieve durability against thermal impact and mechanical impact; and a method for manufacturing the micro gas sensor. The micro gas sensor includes: a vacuum cavity disposed in a substrate; a support layer covering the vacuum cavity; a sealing layer sealing the support layer and the vacuum cavity; a micro heater disposed on the sealing layer; a plurality of electrodes disposed on the micro heater, insulated from the micro heater; and a gas sensitive layer covering the electrodes.
- KSP Keywords
- Cooling Rate, Heating and cooling, Heating and cooling rate, Mechanical impact, Micro gas sensor, Micro-heater, Sensitive layer, Support layer, Temperature Uniformity, Thermal Impact, Vacuum Cavity, gas concentration, gas sensors, sealing layer
- Family
| Status | Patent | Country | KIPRIS |
|---|---|---|---|
| Registered | 마이크로 가스 센서 및 그 제조방법 | KOREA |