등록 MICRO GAS SENSOR AND METHOD FOR MANUFACTURING THE SAME

이미지 확대

MICRO GAS SENSOR AND METHOD FOR MANUFACTURING THE SAME

발명자

Jun Chi Hoon, Sang Choon Ko, Hyeon-Bong Pyo, Park Seon Hee

출원번호

11951986 (2007.12.06)

공개번호

20080134753 (2008.06.12)

등록번호

7963147 (2011.06.21)

출원국

UNITED STATES

협약과제

06MB3200, Ubiquitous Health Monitoring Module and System Development, Park Seon Hee

초록

Provided are a micro gas sensor for measuring a gas concentration configured to achieve a high heating and cooling rate of a gas sensitive layer, achieve temperature uniformity, and achieve durability against thermal impact and mechanical impact; and a method for manufacturing the micro gas sensor. The micro gas sensor includes: a vacuum cavity disposed in a substrate; a support layer covering the vacuum cavity; a sealing layer sealing the support layer and the vacuum cavity; a micro heater disposed on the sealing layer; a plurality of electrodes disposed on the micro heater, insulated from the micro heater; and a gas sensitive layer covering the electrodes.

KSP 제안 키워드

Cooling Rate, Heating and cooling, Heating and cooling rate, Mechanical impact, Micro gas sensor, Micro-heater, Sensitive layer, Support layer, Temperature Uniformity, Thermal Impact, Vacuum Cavity, gas concentration, gas sensors, sealing layer

패밀리

 

패밀리 특허 목록

구분	특허	출원국	KIPRIS
등록	마이크로 가스 센서 및 그 제조방법	KOREA