Subjects : Hydrogen fluoride
| Type | Year | Title | Cited | Download |
|---|---|---|---|---|
| Journal | 2011 | Microfabrication of SiN Membrane Nanosieve Using Anisotropic Reactive Ion Etching (ARIE) with an Ar/CF4 Gas Flow Dae-Sik Lee Journal of Nanoscience and Nanotechnology, v.11, no.5, pp.4511-4516 | 8 | 원문 |
| Journal | 2004 | Surface micromachined thermally driven micropump Jang Won Ick Sensors and Actuators A : Physical, v.115, no.1, pp.151-158 | 21 | 원문 |
| Status | Year | Patent Name | Country | Family Pat. | KIPRIS |
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| Type | Year | Research Project | Primary Investigator | Download |
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