Subjects : limiting characteristics
| Type | Year | Title | Cited | Download |
|---|---|---|---|---|
| Journal | 2005 | Low-Temperature Growth of SiO2 Films by Plasma-Enhanced Atomic Layer Deposition Lim Jungwook ETRI Journal, v.27, no.1, pp.118-121 | 68 | 원문 |
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| Type | Year | Research Project | Primary Investigator | Download |
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