Subjects : TiN hard mask
| Type | Year | Title | Cited | Download |
|---|---|---|---|---|
| Journal | 2008 | Fabrication and Electrical Characterization of Phase-change Memory Devices with Nanoscale Self-heating-channel Structures Yoon Sung Min Microelectronic Engineering, v.85, no.12, pp.2334-2337 | 11 | 원문 |
| Journal | 2006 | Dry Etching of Ge2Sb2Te5 Thin Films into Nanosized Patterns Using TiN Hard Mask Yoon Sung Min Japanese Journal of Applied Physics, v.45, no.40, pp.1080-1083 | 21 | 원문 |
| Status | Year | Patent Name | Country | Family Pat. | KIPRIS |
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| Type | Year | Research Project | Primary Investigator | Download |
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