Subjects : Dissociation kinetics
Type | Year | Title | Cited | Download |
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Journal | 2008 | Model-Based Analysis of Plasma Parameters and Active Species Kinetics in Cl2/X (X=Ar, He, N2) Inductively Coupled Plasmas Alexander Efremov Journal of the Electrochemical Society, v.155, no.12, pp.D777-D782 | 72 | 원문 |
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