Registered DUAL-SIDE MICRO GAS SENSOR AND METHOD OF FABRICATING THE SAME

Inventors

Lee Hyung-Kun, Choi Nak Jin, Moon Seungeon, Kim Jongdae, Jaewoo Lee, Yang Woo Seok

Application No.

13909477 (2013.06.04)

Publication No.

20140175570 (2014.06.26)

Registration No.

8912613 (2014.12.16)

Country

UNITED STATES

Project Code

12MB2400, Development of self-powered smart sensor node platform for smart&green building, Kim Jongdae

Abstract

Provided are a dual-side micro gas sensor and a method of fabricating the same. The sensor may include an elastic layer, a heat-generating resistor layer on the elastic layer, an interlayered insulating layer on the heat-generating resistor layer, an upper sensing layer on the interlayered insulating layer, and a lower sensing layer provided below the elastic layer to face the heat-generating resistor layer, thereby reducing heat loss of the heat-generating resistor layer.

KSP Keywords

Heat Loss, Insulating layer, Micro gas sensor, Sensing layer, elastic layer, gas sensor

Family

 

패밀리 특허 목록

Status	Patent	Country	KIPRIS
Registered	양면 마이크로 가스 센서 및 그의 제조방법	KOREA	KIPRIS