Inventors

문승언, 김정훈, 임종필

Application No.

2023-0006006 (2023.01.16)

Publication No.

10-2024-0045057 (2024.04.05)

Registration No.

2913994 (2026.01.13)

Country

KOREA

Project Code

22JB1100, Development of ultar-compact, low-power MEMS exhalation sensor platform based on CMOS process, Moon Seungeon

KSP Keywords

Manufacturing method, gas sensor

Family

 

패밀리 특허 목록

Status	Patent	Country	KIPRIS
Registered	MEMS GAS SENSOR AND MANUFACTURING METHOD THEREOF	UNITED STATES