Registered
MEMS GAS SENSOR AND MANUFACTURING METHOD THEREOF
- Inventors
-
Moon Seungeon, Kim Jeong Hun, Im Jong Pil
- Application No.
- 18/464772 (2023.09.11)
- Publication No.
- US2024/0110883 A1 (2024.04.04)
- Registration No.
- 12560567 (2026.02.24)
- Country
- UNITED STATES
- Project Code
-
22JB1100, Development of ultar-compact, low-power MEMS exhalation sensor platform based on CMOS process,
Moon Seungeon
- Family
-