자기유지 중앙지지대 미세전자기계적 스위치 및 그의 제조방법
이재우, 강성원, 김윤태
- 7373717 (2008.05.20)
03MB3500, e-Health 구현을 위한 바이오 정보통신 기술,
- Provided is a manufacturing method of self-sustaining center-anchor microelectromechanical switch driven by an electrostatic force used for controlling a signal transmission in an electronic system, which can suppress deformation of a movement plane generated during manufacturing and operation process by inserting the self-sustaining center-anchor, and improve a ground line contact phenomenon of an upper electrode, thereby enhancing reliability and signal isolation feature while maintaining an existing insertion loss feature compared to the microelectromechanical switch of the prior art.