BROWSE
Detail
Registered 자기유지 중앙지지대 미세전자기계적 스위치 및 그의 제조방법
- Inventors
- Jaewoo Lee, Kang Sung Weon, Kim Youn Tae
- Application No.
- 11636449 (2006.12.11)
- Publication No.
- 20070080765 (2007.04.12)
- Registration No.
- 7373717 (2008.05.20)
- Country
- UNITED STATES
- Project Code
- 03MB3500, Bio- Information/Communication Technology for e-Health, Kim Youn Tae
- Abstract
- Provided is a manufacturing method of self-sustaining center-anchor microelectromechanical switch driven by an electrostatic force used for controlling a signal transmission in an electronic system, which can suppress deformation of a movement plane generated during manufacturing and operation process by inserting the self-sustaining center-anchor, and improve a ground line contact phenomenon of an upper electrode, thereby enhancing reliability and signal isolation feature while maintaining an existing insertion loss feature compared to the microelectromechanical switch of the prior art.
- KSP Keywords
- AND operation, Electronic systems, Electrostatic force, Line contact, Manufacturing method, Microelectromechanical switch, Operation process, Self-sustaining, Signal isolation, Signal transmission, insertion loss