Registered
MICRO STAGE USING PIEZOELECTRIC ELEMENT
- Inventors
-
Choi Sang Kuk, Jeong Jin-Woo, Kim Dae Yong, Kim Dae Jun
- Application No.
- 102005045315.5 (2005.09.22)
- Registration No.
- 102005045315.5-41 (2011.01.20)
- Country
- GERMANY
- Project Code
-
04MB2800, Development of Basic Technology for 50nm Next Generation Lithography,
Kim Dae Yong
- KSP Keywords
- piezoelectric element
- Family
-