상세정보
등록 압전소자를 채용한 마이크로 스테이지
- 출원번호
- 11231471 (2005.09.20)
- 공개번호
- 20060131996 (2006.06.22)
- 등록번호
- 7732985 (2010.06.08)
- 출원국
- 미국
- 협약과제
- 04MB2800, 50nm급 차세대 리소그라피 기술, 김대용
- 초록
- Provided is a micro stage comprising: a body having a vertically perforated through-hole passing through a central portion thereof; a bobbin including a tip portion with an electron emission tip embedded in the center thereof, and passing through the through-hole of the body to be moved in the through-hole along a first axis perpendicular to a vertical direction; a first piezoelectric element disposed on the body and lengthened when a voltage is applied thereto to push the bobbin in one direction along the first axis; a second piezoelectric element disposed on the body and lengthened when a voltage is applied thereto to push the bobbin in the other direction along the first axis; and an upper cover that is coupled to an upper portion of the body and has a through-hole, through which the bobbin passes and communicates with the through-hole of the body, wherein the bobbin can be positioned as desired along the first axis by adjusting the voltages applied to the first piezoelectric element and the second piezoelectric element. Accordingly, the emission tip can be exactly and stably positioned using only the movable piezoelectric elements.
- KSP 제안 키워드
- Electron Emission, piezoelectric element, the body, through-hole
- 패밀리
| 구분 | 특허 | 출원국 | KIPRIS |
|---|---|---|---|
| 등록 | 압전소자를 채용한 마이크로 스테이지 | 독일 |