BROWSE
Detail
Registered MICRO STAGE USING PIEZOELECTRIC ELEMENT
- Inventors
- Choi Sang Kuk, Jeong Jin-Woo, Kim Dae Jun, Kim Dae Yong
- Application No.
- 11231471 (2005.09.20)
- Publication No.
- 20060131996 (2006.06.22)
- Registration No.
- 7732985 (2010.06.08)
- Country
- UNITED STATES
- Project Code
- 04MB2800, Development of Basic Technology for 50nm Next Generation Lithography, Kim Dae Yong
- Abstract
- Provided is a micro stage comprising: a body having a vertically perforated through-hole passing through a central portion thereof; a bobbin including a tip portion with an electron emission tip embedded in the center thereof, and passing through the through-hole of the body to be moved in the through-hole along a first axis perpendicular to a vertical direction; a first piezoelectric element disposed on the body and lengthened when a voltage is applied thereto to push the bobbin in one direction along the first axis; a second piezoelectric element disposed on the body and lengthened when a voltage is applied thereto to push the bobbin in the other direction along the first axis; and an upper cover that is coupled to an upper portion of the body and has a through-hole, through which the bobbin passes and communicates with the through-hole of the body, wherein the bobbin can be positioned as desired along the first axis by adjusting the voltages applied to the first piezoelectric element and the second piezoelectric element. Accordingly, the emission tip can be exactly and stably positioned using only the movable piezoelectric elements.
- KSP Keywords
- Electron Emission, piezoelectric element, the body, through-hole
- Family
| Status | Patent | Country | KIPRIS |
|---|---|---|---|
| Registered | MICRO STAGE USING PIEZOELECTRIC ELEMENT | GERMANY |