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Detail
Registered MICRO-ELECTRO MECHANICAL SYSTEMS SWITCH AND METHOD OF FABRICATING THE SAME
- Inventors
- Jaewoo Lee, Chang Han Je, Kang Sung Weon
- Application No.
- 11440863 (2006.05.24)
- Publication No.
- 20070170460 (2007.07.26)
- Registration No.
- 7585113 (2009.09.08)
- Country
- UNITED STATES
- Project Code
- 05MB4100, RF MEMS, Kang Sung Weon
- Abstract
- A MEMS switch and a method of manufacturing the same are disclosed. The MEMS switch includes: a substrate including a trench, a ground line and a signal line having an opened portion; a moving plate separated from the substrate at a predetermined space and including a contact member for connecting an electrode plate and the opened portion and having a deep corrugate to insert the trench; and a supporting member for supporting the moving plate. Such a MEMS switch prevents the thermal expansion and the stiction problem.
- KSP Keywords
- Electro-mechanical, Electrode Plate, MEMS Switch, Micro-electro-mechanical system(MEMS), Moving plate, Signal line, Thermal Expansion, mechanical system