미세전자기계적 구조스위치 및 그 제조방법
이재우, 강성원, 제창한
- 7585113 (2009.09.08)
05MB4100, 초고주파 미세전자기계시스템 기술 개발(RF MEMS),
- A MEMS switch and a method of manufacturing the same are disclosed. The MEMS switch includes: a substrate including a trench, a ground line and a signal line having an opened portion; a moving plate separated from the substrate at a predetermined space and including a contact member for connecting an electrode plate and the opened portion and having a deep corrugate to insert the trench; and a supporting member for supporting the moving plate. Such a MEMS switch prevents the thermal expansion and the stiction problem.
- KSP 제안 키워드
- Electro-mechanical, Electrode Plate, MEMS Switch, Micro-electro-mechanical system(MEMS), Moving plate, Signal line, Thermal Expansion, mechanical system