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Registered MICRO-ELECTRO MECHANICAL SYSTEMS SWITCH AND METHOD OF FABRICATING THE SAME

미세전자기계적 구조스위치 및 그 제조방법
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Inventors
Jaewoo Lee, Chang Han Je, Kang Sung Weon
Application No.
11440863 (2006.05.24)
Publication No.
20070170460 (2007.07.26)
Registration No.
7585113 (2009.09.08)
Country
UNITED STATES
Project Code
05MB4100, RF MEMS, Kang Sung Weon
Abstract
A MEMS switch and a method of manufacturing the same are disclosed. The MEMS switch includes: a substrate including a trench, a ground line and a signal line having an opened portion; a moving plate separated from the substrate at a predetermined space and including a contact member for connecting an electrode plate and the opened portion and having a deep corrugate to insert the trench; and a supporting member for supporting the moving plate. Such a MEMS switch prevents the thermal expansion and the stiction problem.
KSP Keywords
Electro-mechanical, Electrode Plate, MEMS Switch, Micro-electro-mechanical system(MEMS), Moving plate, Signal line, Thermal Expansion, mechanical system