상세정보
등록 1.3um 장파장 수직공진표면발광레이저다이오드의 DBR 제조방법
- 출원번호
- 11544832 (2006.10.05)
- 공개번호
- 20070127535 (2007.06.07)
- 등록번호
- 7369595 (2008.05.06)
- 출원국
- 미국
- 협약과제
- 05MB3600, 광엑세스용 광집적 모듈, 오광룡
- 초록
- A DBR structure in a VCSEL diode, a method of manufacturing the DBR structure, and a VCSEL diode are provided. The DBR structure in the VCSEL diode includes: an InAlGaAs layer having a predetermined refractive index and disposed on an InP substrate; a first InAlAs layer having a lower refractive index than the InAlGaAs layer and disposed on the InAlGaAs layer; an InP layer having a lower refractive index than the InAlGaAs layer and disposed on the first InAlAs layer; and a second InAlAs layer having a lower refractive index than the InAlGaAs layer and disposed on the InP layer. Thus, the DBR structure can reduce optical loss due to type-II band line-up at a junction between the InAlGaAs layer and the InP layer, and thus improve device characteristics.