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Registered DISTRIBUTED BRAGG REFLECTOR (DBR) STRUCTURE IN VERTICAL CAVITY SURFACE EMITTING LASER (VCSEL) DIODE, METHOD OF MANUFACTURING THE SAME, AND VCSEL DIODE

1.3um 장파장 수직공진표면발광레이저다이오드의 DBR 제조방법
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Inventors
Kisoo Kim, Won Seok Han, Dae Kon Oh, Kim Sung Bock
Application No.
11544832 (2006.10.05)
Publication No.
20070127535 (2007.06.07)
Registration No.
7369595 (2008.05.06)
Country
UNITED STATES
Project Code
05MB3600, Photonic device integrated module for optical access network, Oh Kwang Ryong
Abstract
A DBR structure in a VCSEL diode, a method of manufacturing the DBR structure, and a VCSEL diode are provided. The DBR structure in the VCSEL diode includes: an InAlGaAs layer having a predetermined refractive index and disposed on an InP substrate; a first InAlAs layer having a lower refractive index than the InAlGaAs layer and disposed on the InAlGaAs layer; an InP layer having a lower refractive index than the InAlGaAs layer and disposed on the first InAlAs layer; and a second InAlAs layer having a lower refractive index than the InAlGaAs layer and disposed on the InP layer. Thus, the DBR structure can reduce optical loss due to type-II band line-up at a junction between the InAlGaAs layer and the InP layer, and thus improve device characteristics.
KSP Keywords
Band line-up, Bragg reflector, Device characteristics, Distributed Bragg reflector, InP substrate, Line-up, Optical loss, Surface-emitting laser, Type II, Vertical cavity, Vertical cavity surface emitting, refractive index, vertical-cavity surface-emitting laser(VCSEL)