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Registered METHOD OF MANUFACTURING FINE PATTERNABLE CARBON NANO-TUBE EMITTER WITH HIGH RELIABILITY

미세패터닝이 가능한 고 신뢰성의 CNT 에미터 제조 방법
이미지 확대
Inventors
Kim Dae Jun, Yoon-Ho Song, Jeong Jin-Woo
Application No.
11944149 (2007.11.21)
Publication No.
20080139073 (2008.06.12)
Registration No.
7887878 (2011.02.15)
Country
UNITED STATES
Abstract
A method of manufacturing a carbon nano-tube (CNT) emitter includes the steps of: (a) dispersing a CNT powder, an organic binder, a photosensitive material, a monomer, and a nano-sized metal particle in a solvent to manufacture a CNT paste; (b) coating the CNT paste onto an electrode formed over a substrate; (c) exposing the CNT paste coated on the electrode to thereby perform fine-patterning; (d) plasticizing the finely patterned CNT paste; and (e) processing a surface of the CNT paste such that the surface of the plasticized CNT paste is activated, wherein step (d) includes a first plasticizing step performed in an air atmosphere; and a second plasticizing step performed in a vacuum or inactive gas atmosphere. Improved uniformity of electron emissions in a field emission device is achieved and a plurality of CNT emitter regions are formed within a single pixel.
KSP Keywords
CNT paste, Carbon nano-tube(CNT), Gas atmosphere, High Reliability, Improved uniformity, Metal particle, Nano-tube, Organic binder, Photosensitive material, air atmosphere, field emission, field emission device, nano-sized
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패밀리 특허 목록
Status Patent Country KIPRIS
Registered METHOD OF MANUFACTURING FINE PATTERNABLE CARBON NANO-TUBE EMITTER WITH HIGH RELIABILITY TAIWAN
Registered 미세패터닝이 가능한 고 신뢰성의 CNT 에미터 제조 방법 KOREA
Registered The Manufacturing Method of Highly Fine Patternable CNT Paste with High Reliability JAPAN
Registered METHOD OF MANUFACTURING FINE PATTERNABLE CARBON NANO-TUBE EMITTER WITH HIGH RELIABILITY CHINA