미세패터닝이 가능한 고 신뢰성의 CNT 에미터 제조 방법
김대준, 송윤호, 정진우
- 7887878 (2011.02.15)
- A method of manufacturing a carbon nano-tube (CNT) emitter includes the steps of: (a) dispersing a CNT powder, an organic binder, a photosensitive material, a monomer, and a nano-sized metal particle in a solvent to manufacture a CNT paste; (b) coating the CNT paste onto an electrode formed over a substrate; (c) exposing the CNT paste coated on the electrode to thereby perform fine-patterning; (d) plasticizing the finely patterned CNT paste; and (e) processing a surface of the CNT paste such that the surface of the plasticized CNT paste is activated, wherein step (d) includes a first plasticizing step performed in an air atmosphere; and a second plasticizing step performed in a vacuum or inactive gas atmosphere. Improved uniformity of electron emissions in a field emission device is achieved and a plurality of CNT emitter regions are formed within a single pixel.
- KSP 제안 키워드
- CNT paste, Carbon nano-tube(CNT), Gas atmosphere, High Reliability, Improved uniformity, Metal particle, Nano-tube, Organic binder, Photosensitive material, air atmosphere, field emission, field emission device, nano-sized