Registered
METHOD OF MANUFACTURING FINE PATTERNABLE CARBON NANO-TUBE EMITTER WITH HIGH RELIABILITY
- Inventors
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Kim Dae Jun, Yoon-Ho Song, Jeong Jin-Woo
- Application No.
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11944149 (2007.11.21)
- Publication No.
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20080139073 (2008.06.12)
- Registration No.
- 7887878 (2011.02.15)
- Country
- UNITED STATES
- Abstract
- A method of manufacturing a carbon nano-tube (CNT) emitter includes the steps of: (a) dispersing a CNT powder, an organic binder, a photosensitive material, a monomer, and a nano-sized metal particle in a solvent to manufacture a CNT paste; (b) coating the CNT paste onto an electrode formed over a substrate; (c) exposing the CNT paste coated on the electrode to thereby perform fine-patterning; (d) plasticizing the finely patterned CNT paste; and (e) processing a surface of the CNT paste such that the surface of the plasticized CNT paste is activated, wherein step (d) includes a first plasticizing step performed in an air atmosphere; and a second plasticizing step performed in a vacuum or inactive gas atmosphere. Improved uniformity of electron emissions in a field emission device is achieved and a plurality of CNT emitter regions are formed within a single pixel.
- KSP Keywords
- CNT paste, Carbon nano-tube(CNT), Gas atmosphere, High Reliability, Improved uniformity, Metal particle, Nano-tube, Organic binder, Photosensitive material, air atmosphere, field emission, field emission device, nano-sized
- Family
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