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Registered High sensitivity MEMS capacitive accelerometer using stopper system
- Inventors
- Chang Han Je, Hwang Gunn, Lee Myung Lae, Chang Auck Choi, Jung Sung-Hae
- Application No.
- 12517068 (2007.12.05)
- Publication No.
- 20100050771 (2010.03.04)
- Registration No.
- 8113054 (2012.02.14)
- Country
- UNITED STATES
- Project Code
- 06MB3500, Development of CMOS basedMEMS processed multi-functional sensor for ubiquitous environment, Chang Auck Choi
- Abstract
- A conventional capacitive accelerometer has a limitation in reducing a distance between a sensing electrode and a reference electrode, and requires a complex process and a separate method of correcting a clearance difference caused by a process error. However, the capacitive accelerometer of the present invention has high sensitivity, can be simply manufactured by maintaining a very narrow distance between a reference electrode and a sensing electrode, and can make it unnecessary to individually correct each manufactured accelerometer by removing or drastically reducing a functional difference due to a process error.
- KSP Keywords
- Capacitive accelerometer, High Sensitivity, Process error, Reference electrode, Sensing electrode, Stopper system, complex process