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Registered Long Wavelength Vertical Cavity Surface Emitting Laser and Method for Fabricating the Same

장파장 표면방출 레이저 구조및 제조 방법
이미지 확대
Inventors
Miran Park, Kwon O-Kyun
Application No.
11951133 (2007.12.05)
Publication No.
20080137692 (2008.06.12)
Registration No.
7680162 (2010.03.16)
Country
UNITED STATES
Project Code
06MB1900, Photonic device integrated module for optical access network, Oh Kwang Ryong
Abstract
Provided is a vertical cavity surface emitting device. The surface emitting device includes a lower mirror layer emitting light having a long wavelength, an active layer providing an optical gain, a tunnel junction layer for confining a current, and an upper mirror layer, which are sequentially stacked on a compound semiconductor substrate, wherein a heat release layer is formed on side surfaces of at least one of the active layer, the tunnel junction layer and the upper mirror layer by using etching process, and the heat release layer has greater thermal conductivity than at least one of the active layer, the tunnel junction layer and the upper mirror layer.
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Status Patent Country KIPRIS
Registered 장파장 표면 방출 레이저 소자 및 그 제조 방법 KOREA KIPRIS