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Detail
Registered MICRO GAS SENSOR AND MANUFACTURING METHOD THEREOF
- Inventors
- Jun Chi Hoon, Sang Choon Ko, Jung Moon Youn, Park Seon Hee
- Application No.
- 12142695 (2008.06.19)
- Publication No.
- 20090151429 (2009.06.18)
- Registration No.
- 7861575 (2011.01.04)
- Country
- UNITED STATES
- Project Code
- 07MB2700, Ubiquitous Health Monitoring Module and System Development, Park Seon Hee
- Abstract
- A micro gas sensor is disclosed including a substrate; an open cavity formed in the substrate; an electrode pad separation groove formed on the substrate; a first and a second electrode pads formed over the substrate and electrically insulated from each other by the electrode pad separation groove; a micro heater connected to the first electrode pad and configured of a bridge structure suspended over the open cavity; a first sensing electrode extending from the first electrode pad and suspended over the open cavity; a second sensing electrode extending from the first electrode pad and suspended over the open cavity; and a gas sensing film electrically coupled to the micro heater and filling a gap between the first and the second sensing electrodes.
- KSP Keywords
- Bridge structure, Gas sensing, Manufacturing method, Micro gas sensor, Micro-heater, Open cavity, Sensing electrode, Sensing film, gas sensing film, gas sensors