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Registered MICRO GAS SENSOR AND MANUFACTURING METHOD THEREOF

마이크로 가스 센서 및 그 제작 방법
이미지 확대
Inventors
Jun Chi Hoon, Sang Choon Ko, Jung Moon Youn, Park Seon Hee
Application No.
12142695 (2008.06.19)
Publication No.
20090151429 (2009.06.18)
Registration No.
7861575 (2011.01.04)
Country
UNITED STATES
Project Code
07MB2700, Ubiquitous Health Monitoring Module and System Development, Park Seon Hee
Abstract
A micro gas sensor is disclosed including a substrate; an open cavity formed in the substrate; an electrode pad separation groove formed on the substrate; a first and a second electrode pads formed over the substrate and electrically insulated from each other by the electrode pad separation groove; a micro heater connected to the first electrode pad and configured of a bridge structure suspended over the open cavity; a first sensing electrode extending from the first electrode pad and suspended over the open cavity; a second sensing electrode extending from the first electrode pad and suspended over the open cavity; and a gas sensing film electrically coupled to the micro heater and filling a gap between the first and the second sensing electrodes.
KSP Keywords
Bridge structure, Gas sensing, Manufacturing method, Micro gas sensor, Micro-heater, Open cavity, Sensing electrodes, Sensing film, gas sensing film, gas sensors