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Registered PIEZOELECTRIC MICROSPEAKER USING MICROELECTROMECHANICAL SYSTEMS AND METHOD OF MANUFACTURING THE SAME
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PIEZOELECTRIC MICROSPEAKER USING MICROELECTROMECHANICAL SYSTEMS AND METHOD OF MANUFACTURING THE SAME
- Inventors
- Sang Kyun Lee, Hye Jin Kim, Jaewoo Lee, Lee Sung Q, Kang-Ho Park, Kim Jongdae
- Application No.
- 12240138 (2008.09.29)
- Publication No.
- 20090146527 (2009.06.11)
- Registration No.
- 7812505 (2010.10.12)
- Country
- UNITED STATES
- Project Code
- 07MB2600, Components/Module technology for Ubiquitous Terminals, Kim Jongdae
- Abstract
- A piezoelectric microspeaker using microelectromechanical systems (MEMS) and a method of manufacturing the same are provided. The piezoelectric microspeaker includes a piezoelectric layer disposed on an elastic thin layer, and a resonance change unit patterned on one of a bottom surface of the elastic thin layer and a top surface of the piezoelectric layer.
- KSP Keywords
- Bottom surface, Micro-electro-mechanical system(MEMS), piezoelectric layer, thin layer
- Family
| Status | Patent | Country | KIPRIS |
|---|---|---|---|
| Registered | M E M S 를 이용한 압전 소자 마이크로 스피커 및 그 제조 방법 | KOREA | KIPRIS |