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Registered PIEZOELECTRIC MICROPHONE, SPEAKER, MICROPHONE-SPEAKER INTEGRATED DEVICE AND MANUFACTURING METHOD THEREOF
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PIEZOELECTRIC MICROPHONE, SPEAKER, MICROPHONE-SPEAKER INTEGRATED DEVICE AND MANUFACTURING METHOD THEREOF
- Inventors
- Hye Jin Kim, Lee Sung Q, Jaewoo Lee, Sang Kyun Lee, Kang-Ho Park, Kim Jongdae
- Application No.
- 12195311 (2008.08.20)
- Publication No.
- 20090154735 (2009.06.18)
- Registration No.
- 8114697 (2012.02.14)
- Country
- UNITED STATES
- Project Code
- 07MB2600, Components/Module technology for Ubiquitous Terminals, Kim Jongdae
- Abstract
- A piezoelectric microphone, a speaker, a microphone-speaker integrated device and a manufacturing method thereof are provided. The microphone-speaker integrated device includes a silicon substrate and an insulating layer deposited on the silicon substrate; a piezoelectric plate formed on the insulating layer; and a mating electrode formed on the piezoelectric plate. The mating electrode is patterned with a polarity arrayed in series.
- KSP Keywords
- Manufacturing method, Piezoelectric microphone, Piezoelectric plate, Silicon substrate, insulating layer, integrated device