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Registered PIEZOELECTRIC MICROPHONE, SPEAKER, MICROPHONE-SPEAKER INTEGRATED DEVICE AND MANUFACTURING METHOD THEREOF

압전 소자 마이크로폰, 스피커, 마이크로폰-스피커 일체형 장치 및 그 제조방법
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Inventors
Hye Jin Kim, Lee Sung Q, Jaewoo Lee, Sang Kyun Lee, Kang-Ho Park, Kim Jongdae
Application No.
12195311 (2008.08.20)
Publication No.
20090154735 (2009.06.18)
Registration No.
8114697 (2012.02.14)
Country
UNITED STATES
Project Code
07MB2600, Components/Module technology for Ubiquitous Terminals, Kim Jongdae
Abstract
A piezoelectric microphone, a speaker, a microphone-speaker integrated device and a manufacturing method thereof are provided. The microphone-speaker integrated device includes a silicon substrate and an insulating layer deposited on the silicon substrate; a piezoelectric plate formed on the insulating layer; and a mating electrode formed on the piezoelectric plate. The mating electrode is patterned with a polarity arrayed in series.
KSP Keywords
Manufacturing method, Piezoelectric microphone, Piezoelectric plate, Silicon substrate, insulating layer, integrated device