ETRI-Knowledge Sharing Plaform

KOREAN
특허 검색
Status Country
Year ~ Keyword

Detail

Registered BIOSENSOR AND METHOD OF MANUFACTURING THE SAME

바이오 센서 및 그 제조 방법
이미지 확대
Inventors
Tae-Youb Kim, Rae-Man Park, Yang Jong-Heon, Yu Han Young, Jang Moon Gyu
Application No.
12195305 (2008.08.20)
Publication No.
20090152597 (2009.06.18)
Registration No.
8022444 (2011.09.20)
Country
UNITED STATES
Project Code
07MB2700, Ubiquitous Health Monitoring Module and System Development, Park Seon Hee
Abstract
Provided are a biosensor with a silicon nanowire and a method of manufacturing the same, and more particularly, a biosensor with a silicon nanowire including a defect region formed by irradiation of an electron beam, and a method of manufacturing the same. The biosensor includes: a silicon substrate; a source region disposed on the silicon substrate; a drain region disposed on the silicon substrate; and a silicon nanowire disposed on the source region and the drain region, and having a defect region formed by irradiation of an electron beam. Therefore, by irradiating a certain region of a high-concentration doped silicon nanowire with an electron beam to lower electron mobility in the certain region, it is possible to maintain a low contact resistance between the silicon nanowire and a metal electrode and to lower operation current of a biomaterial detection part, thereby improving sensitivity of the biosensor.
KSP Keywords
Contact resistance(73.40.Cg), Electron Beam, High concentration, Low contact resistance, Silicon nanowires(SiNWs), Silicon substrate, Source region, doped silicon, electron mobility, metal electrode