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Registered High sensitive silicon nanowire biosensor using the nanodot

나노점을 이용한 고감도 실리콘 나노와이어 바이오센서
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Inventors
Tae-Youb Kim, Chang-Geun Ahn, Chil Seong Ah, Jang Moon Gyu, Yu Han Young, Yang Jong-Heon
Application No.
13240943 (2011.09.22)
Publication No.
20120015467 (2012.01.19)
Registration No.
8394657 (2013.03.12)
Country
UNITED STATES
Project Code
07MB2700, Ubiquitous Health Monitoring Module and System Development, Park Seon Hee
Abstract
A biosensor using a nanodot and a method of manufacturing the same are provided. A silicon nanowire can be formed by a CMOS process to reduce manufacturing costs. In addition, an electrically charged nanodot is coupled to a target molecule to be detected, in order to readily change conductivity of the silicon nanowire, thereby making it possible to implement a biosensor capable of providing good sensitivity and being manufactured at a low cost.
KSP Keywords
CMOS Process, High sensitive, Low-cost, Nanowire biosensor, Silicon nanowire biosensor, Silicon nanowires(SiNWs), manufacturing cost, target molecule
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Status Patent Country KIPRIS
Registered 나노점을 이용한 바이오 센서 및 그 제조 방법 KOREA KIPRIS
Registered BIOSENSOR USING NANODOT AND METHOD OF MANUFACTURING THE SAME UNITED STATES