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Registered METHOD OF MANUFACTURING THIN FILM TRANSISTOR AND THIN FILM TRANSISTOR SUBSTRATE

박막 트랜지스터의 제조 방법 및 박막 트랜지스터 기판
이미지 확대
Inventors
Koo Jae Bon, In-Kyu You, Cho Kyoung Ik, Seongdeok Ahn
Application No.
13350037 (2012.01.13)
Publication No.
20120161234 (2012.06.28)
Registration No.
8378421 (2013.02.19)
Country
UNITED STATES
Project Code
08MB2900, Development of mobile flexible IOP platform, Cho Kyoung Ik
Abstract
A thin film transistor substrate. The thin film transistor substrate includes a substrate, an adhesive layer on the substrate, and a semiconductor layer having a first doped region, a second doped region and a channel region on the adhesive layer. The thin film transistor substrate further includes a first dielectric layer on the semiconductor layer, a gate electrode overlapping the channel region, a second dielectric layer on the first dielectric layer and the gate electrode, a source electrode disposed on the second insulating layer, and a drain electrode spaced apart from the source electrode on the source electrode. The channel region is disposed between the first doped region and the second doped region, and has a transmittance higher than those of the first doped region and the second doped region.