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Registered MICRO-ELECTROMECHANICAL SYSTEMS (MEMS) MICROPHONE AND METHOD OF MANUFACTURING THE SAME

멤스 마이크로폰 및 그 제조 방법
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Inventors
Jaewoo Lee, Kang-Ho Park, Kim Jongdae
Application No.
12509411 (2009.07.24)
Publication No.
20100158281 (2010.06.24)
Registration No.
8175300 (2012.05.08)
Country
UNITED STATES
Project Code
08MB1800, Components/Module technology for Ubiquitous Terminals, Kim Jongdae
Abstract
Provided are a micro-electromechanical systems (MEMS) microphone and a method of manufacturing the same. A manufacturing process is simplified compared to a conventional art using both upper and lower substrate processes. Since defects which may occur during manufacturing are reduced due to the simplified manufacturing process, the manufacturing throughput is improved, and since durability of the MEMS microphone is improved, system stability against the external environment is improved.
KSP Keywords
Electromechanical system, External environment, MEMS Microphone, Manufacturing processes, Micro-electro-mechanical system(MEMS), System stability
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Status Patent Country KIPRIS
Registered 멤스 마이크로폰 및 그 제조 방법 KOREA KIPRIS
Registered MICRO-ELECTROMECHANICAL SYSTEMS (MEMS) MICROPHONE AND METHOD OF MANUFACTURING THE SAME UNITED STATES