표면 미세기계가공으로 구현되며 후방 음향 챔버 벤팅 홀을 구비한 멤스 마이크로폰 및 그의 제조 방법
이재우, 김종대, 박강호
- 8715514 (2014.05.06)
08MB1800, 유비쿼터스 단말용 부품 모듈,
- Provided are a micro-electromechanical systems (MEMS) microphone and a method of manufacturing the same. A manufacturing process is simplified compared to a conventional art using both upper and lower substrate processes. Since defects which may occur during manufacturing are reduced due to the simplified manufacturing process, the manufacturing throughput is improved, and since durability of the MEMS microphone is improved, system stability against the external environment is improved.
- KSP 제안 키워드
- Electro-mechanical system, External environment, MEMS Microphone, Manufacturing processes, Micro-electro-mechanical system(MEMS), System stability