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Detail
Registered MICRO-ELECTROMECHANICAL SYSTEMS (MEMS) MICROPHONE AND METHOD OF MANUFACTURING THE SAME
- Inventors
- Jaewoo Lee, Kang-Ho Park, Kim Jongdae
- Application No.
- 13434622 (2012.03.29)
- Publication No.
- 20120187077 (2012.07.26)
- Registration No.
- 8715514 (2014.05.06)
- Country
- UNITED STATES
- Project Code
- 08MB1800, Components/Module technology for Ubiquitous Terminals, Kim Jongdae
- Abstract
- Provided are a micro-electromechanical systems (MEMS) microphone and a method of manufacturing the same. A manufacturing process is simplified compared to a conventional art using both upper and lower substrate processes. Since defects which may occur during manufacturing are reduced due to the simplified manufacturing process, the manufacturing throughput is improved, and since durability of the MEMS microphone is improved, system stability against the external environment is improved.
- Family
| Status | Patent | Country | KIPRIS |
|---|---|---|---|
| Registered | 멤스 마이크로폰 및 그 제조 방법 | KOREA | KIPRIS |
| Registered | MICRO-ELECTROMECHANICAL SYSTEMS (MEMS) MICROPHONE AND METHOD OF MANUFACTURING THE SAME | UNITED STATES |