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Registered CAPACITIVE GAS SENSOR AND METHOD OF FABRICATING THE SAME
- Inventors
- Jaehyun Moon, Su Jae Lee, Park Jin Ah, Taehyoung Zyung
- Application No.
- 12502824 (2009.07.14)
- Publication No.
- 20100133528 (2010.06.03)
- Registration No.
- 7816681 (2010.10.19)
- Country
- UNITED STATES
- Project Code
- 07ZB1200, Future Technology Researches in the Fields of Informations and Telecommunications, Taehyoung Zyung
- Abstract
- A capacitive gas sensor and a method of fabricating the same are provided. The capacitive gas sensor includes an insulating substrate, a metal electrode and a micro thin-film heater wire integrally formed on the same plane of the insulating substrate, and an oxide detection layer coated on the metal electrode and the micro thin-film heater wire. The fabrication method includes depositing a metal layer on an insulating substrate, etching the metal layer so that a metal electrode and a micro thin-film heater wire form an interdigital transducer on the same plane, and forming a nano crystal complex oxide thin film or a complex oxide nano fiber coating layer on the metal electrode and the micro thin-film heater wire as a detecting layer. The capacitive gas sensor can be easily fabricated and can have excellent characteristics such as high sensitivity, high selectivity, high stability, and low power consumption.
- KSP Keywords
- Capacitive gas sensor, Fabrication method, Fiber coating, High Sensitivity, Low-Power, Nano crystal, Nano fiber, Oxide thin films, Power Consumption, coating layer, complex oxide, film heaters, gas sensors, high selectivity, high stability, insulating substrate, interdigital transducer, low power consumption, metal electrode, metal layer, thin film(TF), thin film heater
- Family
| Status | Patent | Country | KIPRIS |
|---|---|---|---|
| Registered | 정전용량형 산화물 환경유해가스 센서 및 그 제조방법 | KOREA | KIPRIS |