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Registered CAPACITIVE GAS SENSOR AND METHOD OF FABRICATING THE SAME
- Inventors
- Jaehyun Moon, Su Jae Lee, Park Jin Ah, Taehyoung Zyung
- Application No.
- 12502824 (2009.07.14)
- Publication No.
- 20100133528 (2010.06.03)
- Registration No.
- 7816681 (2010.10.19)
- Country
- UNITED STATES
- Project Code
- 07ZB1200, Future Technology Researches in the Fields of Informations and Telecommunications, Taehyoung Zyung
- Abstract
- A capacitive gas sensor and a method of fabricating the same are provided. The capacitive gas sensor includes an insulating substrate, a metal electrode and a micro thin-film heater wire integrally formed on the same plane of the insulating substrate, and an oxide detection layer coated on the metal electrode and the micro thin-film heater wire. The fabrication method includes depositing a metal layer on an insulating substrate, etching the metal layer so that a metal electrode and a micro thin-film heater wire form an interdigital transducer on the same plane, and forming a nano crystal complex oxide thin film or a complex oxide nano fiber coating layer on the metal electrode and the micro thin-film heater wire as a detecting layer. The capacitive gas sensor can be easily fabricated and can have excellent characteristics such as high sensitivity, high selectivity, high stability, and low power consumption.
- Family
| Status | Patent | Country | KIPRIS |
|---|---|---|---|
| Registered | 정전용량형 산화물 환경유해가스 센서 및 그 제조방법 | KOREA | KIPRIS |