BROWSE
Detail
Registered VERTICAL ACCELEROMETER
- Inventors
- Chang Han Je, Sang Choon Ko, Jang Moon Gyu, Chang Auck Choi
- Application No.
- 12783789 (2010.05.20)
- Publication No.
- 20110138913 (2011.06.16)
- Registration No.
- 8544326 (2013.10.01)
- Country
- UNITED STATES
- Project Code
- 09MB1600, Development of CMOS based MEMS processed multi-functional sensor for ubiquitous environment, Chang Auck Choi
- Abstract
- Provided is a vertical accelerometer for measuring acceleration applied perpendicular to a substrate to increase sensitivity thereof. The vertical accelerometer includes a substrate, and a plurality of unit vertical accelerometers, each having a detection mass disposed on the substrate to be rotated by acceleration applied perpendicular to the substrate, and a detection electrode formed at the detection mass. Here, the unit vertical accelerometers are provided to be in contact with the detection electrodes to detect the acceleration through variation in capacitance due to variation in area in which the contacted detection electrodes overlaps each other.