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성과물

특허 검색
구분 출원국
출원년도 ~ 키워드

상세정보

등록 박막 증착 장치

박막 증착 장치
이미지 확대
발명자
정우석
출원번호
13182590 (2011.07.14)
공개번호
20120090543 (2012.04.19)
등록번호
9115425 (2015.08.25)
출원국
미국
초록
Provided is a thin film depositing apparatus. The thin film depositing apparatus includes: a loading chamber loading a plurality of substrates; a first process chamber connected to the loading chamber and including a plurality of sputter guns inducing a first plasma on the plurality of substrates; a buffer chamber connected to the other side of the first process chamber facing the loading chamber; and a substrate transfer module simultaneously passing the plurality of substrates between the plurality of sputter guns during a process using the first plasma and transferring the plurality of substrates from the first process chamber to the buffer chamber.