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Registered MICROELECTROMECHANICAL SYSTEMS TYPE SEMICONDUCTOR GAS SENSOR USING MICROHEATER HAVING MANY HOLES AND METHOD FOR MANUFACTURING THE SAME
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MICROELECTROMECHANICAL SYSTEMS TYPE SEMICONDUCTOR GAS SENSOR USING MICROHEATER HAVING MANY HOLES AND METHOD FOR MANUFACTURING THE SAME
- Inventors
- Moon Seungeon, Jaewoo Lee, Choi Nak Jin, Lee Hyung-Kun, Yang Woo Seok, Kim Jongdae
- Application No.
- 13345772 (2012.01.09)
- Publication No.
- 20120198918 (2012.08.09)
- Registration No.
- 8683847 (2014.04.01)
- Country
- UNITED STATES
- Project Code
- 10MB3300, Development of self-powered smart sensor node platform for smart&green building, Kim Jongdae
- Abstract
- Disclosed are an MEMS type semiconductor gas sensor using a microheater having many holes and a method for manufacturing the same. The MEMS type semiconductor gas sensor includes: a substrate of which a central region is etched with a predetermined thickness; a second membrane formed at an upper portion of the central region of the substrate and having many holes; a heat emitting resistor formed on the second membrane and having many holes; a first membrane formed on the second membrane including the heat emitting resistor and having many holes; a sensing electrode formed on the first membrane and having many holes; and a sensing material formed on the sensing electrode.
- KSP Keywords
- Central region, Micro-electro-mechanical system(MEMS), Semiconductor gas sensor, Sensing electrodes, Sensing material, gas sensors
- Family
| Status | Patent | Country | KIPRIS |
|---|---|---|---|
| Registered | Micro Electro Mechanical Systems Type Semiconductor Type Gas Sensor Using Microheater Having Holes and Method fr Manufacturing the Same | KOREA | KIPRIS |