다수의 구멍을 가진 마이크로히터와 이를 이용한 MEMS형 반도체식 가스 센서
문승언, 이재우, 이형근, 최낙진, 김종대, 양우석
- 8683847 (2014.04.01)
10MB3300, 스마트&그린 빌딩용 자가충전 지능형 센서노드 플랫폼 개발,
- Disclosed are an MEMS type semiconductor gas sensor using a microheater having many holes and a method for manufacturing the same. The MEMS type semiconductor gas sensor includes: a substrate of which a central region is etched with a predetermined thickness; a second membrane formed at an upper portion of the central region of the substrate and having many holes; a heat emitting resistor formed on the second membrane and having many holes; a first membrane formed on the second membrane including the heat emitting resistor and having many holes; a sensing electrode formed on the first membrane and having many holes; and a sensing material formed on the sensing electrode.
- KSP 제안 키워드
- Central region, Micro-electro-mechanical system(MEMS), Semiconductor gas sensor, Sensing electrodes, Sensing material, gas sensors