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Registered SUPERLUMINESCENT DIODE, METHOD OF MANUFACTURING THE SAME, AND WAVELENGTH-TUNABLE EXTERNAL CAVITY LASER INCLUDING THE SAME

초고속으로 동작하는 RWG-SLD 구조 및 그 소자를 이용한 외부공진 파장 가변 레이저
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Inventors
Oh Su Hwan, Kwon O-Kyun, Kwon Oh Kee, Yoon Ki-Hong, Kisoo Kim, Choi Byung-Seok, Kim Jongbae
Application No.
14616149 (2015.02.06)
Publication No.
20150155428 (2015.06.04)
Registration No.
9343614 (2016.05.17)
Country
UNITED STATES
Project Code
10MB2200, Development of optical component technologies for advanced FTTH, Kwon O-Kyun
Abstract
Provided are a high-speed superluminescent diode, a method of manufacturing the same, and a wavelength-tunable external cavity laser including the same. The superluminescent diode includes a substrate having an active region and an optical mode size conversion region, waveguides including an ridge waveguide in the active region and a deep ridge waveguide in the optical mode size conversion region connected to the active waveguide, an electrode disposed on the ridge waveguide; planarizing layers disposed on sides of the ridge waveguide and the deep ridge waveguide on the substrate, and a pad electrically connected to the electrode, the pad being disposed on the planarizing layers outside the active waveguide.
KSP Keywords
Active waveguide, External cavity, External cavity laser(ECL), High-speed, Optical mode, Size conversion, Superluminescent diodes(SLDs), active region, deep-ridge waveguide, ridge waveguide, wavelength tunable