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Detail
Registered ACTIVE METAMATERIAL DEVICE AND MANUFACTURING METHOD OF THE SAME
- Inventors
- Choi Choon Gi, Muhan Choi, Sung-Yool Choi
- Application No.
- 13431142 (2012.03.27)
- Publication No.
- 20130002520 (2013.01.03)
- Registration No.
- 8890767 (2014.11.18)
- Country
- UNITED STATES
- Project Code
- 10SB1300, Development of Metamaterial-based Nano-resolution Imaging System Technology, Choi Choon Gi
- Abstract
- Provided are an active metamaterial device operating at a high speed and a manufacturing method thereof. The active metamaterial device includes a first dielectric layer, a lower electrode disposed on the first dielectric layer, a second dielectric layer disposed on the lower electrode, metamaterial patterns disposed on the second dielectric layer, a couple layer disposed on the metamaterial patterns and the second dielectric layer, a third dielectric layer disposed on the couple layer, and an upper electrode disposed on the third dielectric layer.
- KSP Keywords
- High Speed, Manufacturing method, active metamaterials, dielectric layer, metamaterial patterns