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Registered ACTIVE METAMATERIAL DEVICE AND MANUFACTURING METHOD OF THE SAME

그래핀 메타물질 능동소자
이미지 확대
Inventors
Choi Choon Gi, Muhan Choi, Sung-Yool Choi
Application No.
13431142 (2012.03.27)
Publication No.
20130002520 (2013.01.03)
Registration No.
8890767 (2014.11.18)
Country
UNITED STATES
Project Code
10SB1300, Development of Metamaterial-based Nano-resolution Imaging System Technology, Choi Choon Gi
Abstract
Provided are an active metamaterial device operating at a high speed and a manufacturing method thereof. The active metamaterial device includes a first dielectric layer, a lower electrode disposed on the first dielectric layer, a second dielectric layer disposed on the lower electrode, metamaterial patterns disposed on the second dielectric layer, a couple layer disposed on the metamaterial patterns and the second dielectric layer, a third dielectric layer disposed on the couple layer, and an upper electrode disposed on the third dielectric layer.
KSP Keywords
High Speed, Manufacturing method, active metamaterials, dielectric layer, metamaterial patterns