Registered
MEMS ELECTROCHEMICAL GAS SENSOR
- Inventors
-
Moon Seungeon, Jaewoo Lee, Lee Hyung-Kun, Choi Nak Jin, Yang Woo Seok, Kim Jongdae
- Application No.
-
13620546 (2012.09.14)
- Publication No.
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20130075255 (2013.03.28)
- Registration No.
- 9494543 (2016.11.15)
- Country
- UNITED STATES
- Project Code
-
11MB2100, Development of self-powered smart sensor node platform for smart and green building,
Kim Jongdae
- Abstract
- Disclosed is an electrochemical gas sensor using micro electro mechanical systems (MEMS). The MEMS electrochemical gas sensor includes: a substrate a lower central region of which is etched by a predetermined thickness; a first insulation film formed on the substrate; a heat emitting resistance body formed on the first insulation film; a second insulation film formed on the heat emitting resistance body; a reference electrode formed in an upper central region of the second insulation film; a solid electrolyte formed on the reference electrode; and a detection electrode formed on the solid electrolyte.
- KSP Keywords
- Central region, Electro-mechanical, Electrochemical gas sensor, Micro-electro-mechanical system(MEMS), Solid electrolyte, gas sensors, mechanical system, reference electrode