등록
저소모전력 특성의 MEMS형 전기화학식 가스 센서
- 발명자
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문승언, 이형근, 최낙진, 이재우, 양우석, 김종대
- 출원번호
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13620546 (2012.09.14)
- 공개번호
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20130075255 (2013.03.28)
- 등록번호
- 9494543 (2016.11.15)
- 출원국
- 미국
- 협약과제
-
11MB2100, 스마트and그린 빌딩용 자가충전 지능형 센서노드 플랫폼 핵심기술 개발,
김종대
- 초록
- Disclosed is an electrochemical gas sensor using micro electro mechanical systems (MEMS). The MEMS electrochemical gas sensor includes: a substrate a lower central region of which is etched by a predetermined thickness; a first insulation film formed on the substrate; a heat emitting resistance body formed on the first insulation film; a second insulation film formed on the heat emitting resistance body; a reference electrode formed in an upper central region of the second insulation film; a solid electrolyte formed on the reference electrode; and a detection electrode formed on the solid electrolyte.
- KSP 제안 키워드
- Central region, Electro-mechanical, Electrochemical gas sensor, Micro-electro-mechanical system(MEMS), Solid electrolyte, gas sensors, mechanical system, reference electrode